Tube annealing furnaces are used for diffusion, oxidation, annealing, alloying, and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices, and optical fibers. They can be customized according to different customer needs and supplied directly by manufacturers.
Main technical parameters
◆ Quantity of process tubes: 1-4 tubes can be made according to customer needs
Process pipe diameter: Φ 90-360mm (3-12 inches)
◆ Structural type: horizontal hot wall type or vertical type
Working temperature range: 400-1280 ℃
◆ Constant temperature zone length and accuracy ± 0.5 ℃/1080mm
Process uniformity: ≤± 5% (30~60 ohms)
Gas flow rate setting accuracy: ± 1% F S
Air tightness of the pneumatic system: 1 × 10-7pa.m3/s
◆ Ultra clean workbench: Purification level: 100 level (10000 level factory building)
Noise: ≤ 62dB (A)
Vibration: ≤ 3 μ m
Control mode: Industrial microcomputer control
◆ Record the number of process curves and steps without restriction
Pre sales consultant
